@inproceedings{a71b9f41c0ec4250951d124023d6ae4c,
title = "Thin glass processing with various laser sources",
abstract = "Laser processing of thin glass has proven problematic due to the inefficient coupling of optical energy into glass and the difficulty achieving an economical processing speed while maintaining cut quality. Laser glass processing is pertinent to touch screen display, microfluidic, microoptic and photovoltaic applications. The results of the laser scribing of 110 μm thick alkali free glass with various laser sources are presented. The laser sources include a CO2 laser, nanosecond UV laser and femtosecond IR laser. The contrasting absorption mechanisms are discussed. Cut quality and processing speed are characterised using SEM and optical microscopy techniques.",
keywords = "CO<inf>2</inf> laser, Dielectric, Glass processing, Laser ablation, Laser processing, Thin glass, Ultrashort laser",
author = "Adam Collins",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; Laser-Based Micro- and Nanoprocessing IX ; Conference date: 10-02-2015 Through 12-02-2015",
year = "2015",
month = jan,
day = "1",
language = "English (Ireland)",
series = "0277-786X",
publisher = "SPIE",
editor = "Udo Klotzbach and Kunihiko Washio and Arnold, \{Craig B.\}",
booktitle = "Laser-based Micro-and Nanoprocessing IX",
}