Scope for electric field assisted removal of ablated debris from laser machined features in silicon

  • Thomas J. Glynn

Research output: Contribution to a Journal (Peer & Non Peer) › Article

Original languageEnglish (Ireland)
JournalProc Spie
Volume5713
Publication statusPublished - 1 Jan 2005

Authors (Note for portal: view the doc link for the full list of authors)

  • Authors
  • Coyne,E.,Mannion,P., O'Connor,G.M., Favre,S.,Glynn,T.J.

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