Partial spatial coherence in an excimer-laser lithographic imaging system

Arlene Smith; Anna Burvall; Christopher Dainty

doi:10.1117/12.846349

Partial spatial coherence in an excimer-laser lithographic imaging system

Arlene Smith, Anna Burvall, Christopher Dainty

Physics

University of Galway

Research output: Chapter in Book or Conference Publication/Proceeding › Conference Publication › peer-review

1 Citation (Scopus)

Abstract

We have recently explored the Elementary Function method, previously presented by Wald et al (Proc. SPIE 59621G, 2005), and we have demonstrated under what circumstances this method can be used to reduce the propagation calculations of partially coherent light to two dimensions. In this paper, we examine the methods used to measure the spatial coherence of a light source in the literature. We present a method based on work previously shown by Mejia et al (Opt Comm 273 (428-434), 2007) which uses an array of pinholes with one degree of redundancy. We discuss the design of the pinhole array and present the results of some simulations.

Original language	English
Title of host publication	Optical Microlithography XXIII
Publisher	SPIE
ISBN (Print)	9780819480545
DOIs	https://doi.org/10.1117/12.846349
Publication status	Published - 2010
Event	Optical Microlithography XXIII - San Jose, CA, United States Duration: 23 Feb 2010 → 25 Feb 2010

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7640
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Optical Microlithography XXIII
Country/Territory	United States
City	San Jose, CA
Period	23/02/10 → 25/02/10

Keywords

elementary function
excimer
imaging
Partial coherence

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10.1117/12.846349

Cite this

@inproceedings{51f7151cc3a649038a8e302a223124f5,

title = "Partial spatial coherence in an excimer-laser lithographic imaging system",

abstract = "We have recently explored the Elementary Function method, previously presented by Wald et al (Proc. SPIE 59621G, 2005), and we have demonstrated under what circumstances this method can be used to reduce the propagation calculations of partially coherent light to two dimensions. In this paper, we examine the methods used to measure the spatial coherence of a light source in the literature. We present a method based on work previously shown by Mejia et al (Opt Comm 273 (428-434), 2007) which uses an array of pinholes with one degree of redundancy. We discuss the design of the pinhole array and present the results of some simulations.",

keywords = "elementary function, excimer, imaging, Partial coherence",

author = "Arlene Smith and Anna Burvall and Christopher Dainty",

year = "2010",

doi = "10.1117/12.846349",

language = "English",

isbn = "9780819480545",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

booktitle = "Optical Microlithography XXIII",

note = "Optical Microlithography XXIII ; Conference date: 23-02-2010 Through 25-02-2010",

}

Partial spatial coherence in an excimer-laser lithographic imaging system. / Smith, Arlene; Burvall, Anna; Dainty, Christopher.
Optical Microlithography XXIII. SPIE, 2010. 764029 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7640).

Research output: Chapter in Book or Conference Publication/Proceeding › Conference Publication › peer-review

TY - GEN

T1 - Partial spatial coherence in an excimer-laser lithographic imaging system

AU - Smith, Arlene

AU - Burvall, Anna

AU - Dainty, Christopher

PY - 2010

Y1 - 2010

N2 - We have recently explored the Elementary Function method, previously presented by Wald et al (Proc. SPIE 59621G, 2005), and we have demonstrated under what circumstances this method can be used to reduce the propagation calculations of partially coherent light to two dimensions. In this paper, we examine the methods used to measure the spatial coherence of a light source in the literature. We present a method based on work previously shown by Mejia et al (Opt Comm 273 (428-434), 2007) which uses an array of pinholes with one degree of redundancy. We discuss the design of the pinhole array and present the results of some simulations.

AB - We have recently explored the Elementary Function method, previously presented by Wald et al (Proc. SPIE 59621G, 2005), and we have demonstrated under what circumstances this method can be used to reduce the propagation calculations of partially coherent light to two dimensions. In this paper, we examine the methods used to measure the spatial coherence of a light source in the literature. We present a method based on work previously shown by Mejia et al (Opt Comm 273 (428-434), 2007) which uses an array of pinholes with one degree of redundancy. We discuss the design of the pinhole array and present the results of some simulations.

KW - elementary function

KW - excimer

KW - imaging

KW - Partial coherence

UR - http://www.scopus.com/inward/record.url?scp=84905457654&partnerID=8YFLogxK

U2 - 10.1117/12.846349

DO - 10.1117/12.846349

M3 - Conference Publication

AN - SCOPUS:84905457654

SN - 9780819480545

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Optical Microlithography XXIII

PB - SPIE

T2 - Optical Microlithography XXIII

Y2 - 23 February 2010 through 25 February 2010

ER -

Partial spatial coherence in an excimer-laser lithographic imaging system

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