Metallization of high aspect ratio, out of plane structures

Patricia Vazquez

Research output: Chapter in Book or Conference Publication/ProceedingConference Publicationpeer-review

Original languageEnglish (Ireland)
Title of host publication2009 3rd International Workshop on Advances in sensors and Interfaces
Number of pages3
Publication statusPublished - 1 Jun 2009

Authors (Note for portal: view the doc link for the full list of authors)

  • Authors
  • Vazquez, Patricia and Dimaki, Maria and Svendsen, Winnie E.

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