@inproceedings{0b4108f91f4e4ea79f11ccdbdaa7ee2c,
title = "Machining hole arrays in polyimide using a UV solid state laser and predetermined temporal pulse patterns",
abstract = "A solid-state UV laser was used to make arrays of reproducible percussion-drilled micron-sized holes in polyimide. An optical switch was employed as a pulse picker to select specific patterns of pulses from the high repetition rate laser beam. The ability to control and vary the number of pulses per burst and the time between bursts enhanced the drilling rate while minimizing thermal damage around the holes. The optimum pulse patterns were determined experimentally. A photodiode acted as a breakthrough sensor to end the drilling and optimize the exit hole size and quality. Results were compared with computer simulations of the drilling process based on modeling of the laser/material interaction.",
keywords = "Hole arrays, Laser drilling, Polyimide, Pulse picker, UV",
author = "Claire Mullan and Diana Ilie and O'Connor, \{Gerard M.\} and Sebastian Favre and Glynn, \{Thomas J.\}",
year = "2007",
doi = "10.1117/12.700592",
language = "English",
isbn = "0819465720",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Laser-based Micro- and Nanopackaging and Assembly",
note = "Laser-based Micro- and Nanopackaging and Assembly ; Conference date: 22-01-2007 Through 24-01-2007",
}