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Gallium Nitride led shaping by DPSS laser processing

Research output: Contribution to conference (Published)Paperpeer-review

Abstract

Gallium Nitride (GaN) free-standing substrate material has attracted considerable attention recently for high quality LED and Laser fabrication due to their better lattice and thermal match with the LED/Laser epi-layers than existing substrates (Sapphire or SiC). However there is still scope for the further development of both the substrate material and the epi-layer LED structures. Here we report on a preliminary investigation of the shaping capabilities of a laser-machining system on GaN LED wafer substrates. The pieces were scribed and shaped using a Nd:YVO4 diode pumped solid state AVIA 355-7000 laser (Coherent). Finally the machining of 2-dimensional scribing patterns in the free-standing wafer materials is discussed.

Original languageEnglish
Pages365-367
Number of pages3
Publication statusPublished - 2008
EventICALEO 2008 - 27th International Congress on Applications of Lasers and Electro-Optics - Temecula, CA, United States
Duration: 20 Oct 200823 Oct 2008

Conference

ConferenceICALEO 2008 - 27th International Congress on Applications of Lasers and Electro-Optics
Country/TerritoryUnited States
CityTemecula, CA
Period20/10/0823/10/08

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  1. SDG 9 - Industry, Innovation, and Infrastructure
    SDG 9 Industry, Innovation, and Infrastructure

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