Abstract
Gallium Nitride (GaN) free-standing substrate material has attracted considerable attention recently for high quality LED and Laser fabrication due to their better lattice and thermal match with the LED/Laser epi-layers than existing substrates (Sapphire or SiC). However there is still scope for the further development of both the substrate material and the epi-layer LED structures. Here we report on a preliminary investigation of the shaping capabilities of a laser-machining system on GaN LED wafer substrates. The pieces were scribed and shaped using a Nd:YVO4 diode pumped solid state AVIA 355-7000 laser (Coherent). Finally the machining of 2-dimensional scribing patterns in the free-standing wafer materials is discussed.
| Original language | English |
|---|---|
| Pages | 365-367 |
| Number of pages | 3 |
| Publication status | Published - 2008 |
| Event | ICALEO 2008 - 27th International Congress on Applications of Lasers and Electro-Optics - Temecula, CA, United States Duration: 20 Oct 2008 → 23 Oct 2008 |
Conference
| Conference | ICALEO 2008 - 27th International Congress on Applications of Lasers and Electro-Optics |
|---|---|
| Country/Territory | United States |
| City | Temecula, CA |
| Period | 20/10/08 → 23/10/08 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
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