Development of a prediction equation for depth, aspect ratio and trench roughness pertaining to excimer laser ablation of polymer materials

Thomas J. Glynn

Research output: Contribution to a Journal (Peer & Non Peer) › Article

Original languageEnglish (Ireland)
JournalProc Spie
Volume5827
Publication statusPublished - 1 Jan 2005

Authors (Note for portal: view the doc link for the full list of authors)

  • Authors
  • McGinty,S.,O'Connor,G.M., Glynn,T.J.

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