Development of a prediction equation for depth, aspect ratio and trench roughness pertaining to excimer laser ablation of polymer materials

Gerard O'Connor

Development of a prediction equation for depth, aspect ratio and trench roughness pertaining to excimer laser ablation of polymer materials

Physics

Research output: Chapter in Book or Conference Publication/Proceeding › Conference Publication › peer-review

Original language	English (Ireland)
Title of host publication	SPIE OptoIreland: Laser-based Materials Processing
Volume	5825
Publication status	Published - 1 Jan 2005

Authors (Note for portal: view the doc link for the full list of authors)

Authors
Oconnor,G.M.

Cite this

@inproceedings{a3c9677b31544b9f89990c57a4bb6603,

title = "Development of a prediction equation for depth, aspect ratio and trench roughness pertaining to excimer laser ablation of polymer materials",

author = "Gerard O'Connor",

year = "2005",

month = jan,

day = "1",

language = "English (Ireland)",

volume = "5825",

booktitle = "SPIE OptoIreland: Laser-based Materials Processing",

}