Abstract
The aim of this work is to investigate the application of the spectral reflectance technique to thickness measurement of highly localised semi-transparent coatings on miniature geometries, such as those used in the medical devices industry. The paper will describe the application of the technique to coatings on curved or non-uniform surfaces such as narrow-bore metal tubes and thin wires. The paper will describe the equipment used including a spectrometer with micro-focus attachment, and optical modelling software. This work also involved laser-drilling of the polymer films to allow complementary step-height measurements to be made. Special steps were also required to overcome problems in measurement due to the transparency of the thin films. Complementary techniques including white-light interferometry, which were used to benchmark the method, will also be described.
| Original language | English |
|---|---|
| Pages (from-to) | 976-983 |
| Number of pages | 8 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4876 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2002 |
| Event | Opto-Ireland 2002: Optics and Photonics Technologies and Applications - Galway, Ireland Duration: 5 Sep 2002 → 6 Sep 2002 |