Analysis of thermal damage in bulk silicon with femtosecond laser micromachining

Research output: Chapter in Book or Conference Publication/Proceeding › Conference Publication › peer-review

Original language	English (Ireland)
Title of host publication	Photon Processing in Microelectronics and Photonics III, Proc SPIE Vol
Volume	5339
Publication status	Published - 1 Jan 2004

Authors (Note for portal: view the doc link for the full list of authors)

This output contributes to the following UN Sustainable Development Goals (SDGs)

@inproceedings{2cf5a68b9cd74e248d853b57e0c93a3d,

title = "Analysis of thermal damage in bulk silicon with femtosecond laser micromachining",

author = "Gerard O'Connor",

year = "2004",

month = jan,

day = "1",

language = "English (Ireland)",

volume = "5339",

booktitle = "Photon Processing in Microelectronics and Photonics III, Proc SPIE Vol",

}