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Analysis of debris generated during UV laser micro-machining of silicon

  • Thomas J. Glynn

Research output: Contribution to a Journal (Peer & Non Peer) › Article

Original languageEnglish (Ireland)
JournalProc Spie
Volume5339
Publication statusPublished - 1 Jan 2004

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  1. SDG 9 - Industry, Innovation, and Infrastructure
    SDG 9 Industry, Innovation, and Infrastructure

Authors (Note for portal: view the doc link for the full list of authors)

  • Authors
  • O'Connor,G.M.,Howard,H., Conneely,A.J., Glynn,T.J.

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