A comparative study of channel formation in polymer materials using VUV and UV nano-second laser sources for use in micro-fluidic applications

Scan McGinty; Gerard M. O'Connor; Thomas J. Glynn

doi:10.1117/12.605144

A comparative study of channel formation in polymer materials using VUV and UV nano-second laser sources for use in micro-fluidic applications

Scan McGinty
, Gerard M. O'Connor
, Thomas J. Glynn

Physics

University of Galway

Research output: Contribution to a Journal (Peer & Non Peer) › Conference article › peer-review

6 Citations (Scopus)

Abstract

UV and VUV laser ablation of micro-fluidic circuits for micro-total analysis systems (μTAS) is an alternative to more expensive techniques of LIGA or micro-moulding. The machining of trenches in PS, PC, PMMA (CQ grade and non-CQ grade) was investigated using two Q-switched solid state lasers. one operating at 266nm (fourth harmonic) and another at 355nm (third harmonic). These results were compared with results achieved using a 193nm Excimer laser. The structuring of the channels depends on both the laser wavelength and the target material. A comparison of the process will be presented with respect to the structure quality and efficiency of the process.

Original language	English
Article number	101
Pages (from-to)	622-633
Number of pages	12
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5825
DOIs	https://doi.org/10.1117/12.605144
Publication status	Published - 2005
Event	Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks - Dublin, Ireland Duration: 4 Apr 2005 → 6 Apr 2005

Keywords

Laser ablation
Micro-fluidics
Polymer materials

Access to Document

10.1117/12.605144

Cite this

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title = "A comparative study of channel formation in polymer materials using VUV and UV nano-second laser sources for use in micro-fluidic applications",

abstract = "UV and VUV laser ablation of micro-fluidic circuits for micro-total analysis systems (μTAS) is an alternative to more expensive techniques of LIGA or micro-moulding. The machining of trenches in PS, PC, PMMA (CQ grade and non-CQ grade) was investigated using two Q-switched solid state lasers. one operating at 266nm (fourth harmonic) and another at 355nm (third harmonic). These results were compared with results achieved using a 193nm Excimer laser. The structuring of the channels depends on both the laser wavelength and the target material. A comparison of the process will be presented with respect to the structure quality and efficiency of the process.",

keywords = "Laser ablation, Micro-fluidics, Polymer materials",

author = "Scan McGinty and O'Connor, \{Gerard M.\} and Glynn, \{Thomas J.\}",

year = "2005",

doi = "10.1117/12.605144",

language = "English",

volume = "5825",

pages = "622--633",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks ; Conference date: 04-04-2005 Through 06-04-2005",

}

A comparative study of channel formation in polymer materials using VUV and UV nano-second laser sources for use in micro-fluidic applications. / McGinty, Scan; O'Connor, Gerard M.; Glynn, Thomas J.
In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5825, 101, 2005, p. 622-633.

Research output: Contribution to a Journal (Peer & Non Peer) › Conference article › peer-review

TY - JOUR

T1 - A comparative study of channel formation in polymer materials using VUV and UV nano-second laser sources for use in micro-fluidic applications

AU - McGinty, Scan

AU - O'Connor, Gerard M.

AU - Glynn, Thomas J.

PY - 2005

Y1 - 2005

N2 - UV and VUV laser ablation of micro-fluidic circuits for micro-total analysis systems (μTAS) is an alternative to more expensive techniques of LIGA or micro-moulding. The machining of trenches in PS, PC, PMMA (CQ grade and non-CQ grade) was investigated using two Q-switched solid state lasers. one operating at 266nm (fourth harmonic) and another at 355nm (third harmonic). These results were compared with results achieved using a 193nm Excimer laser. The structuring of the channels depends on both the laser wavelength and the target material. A comparison of the process will be presented with respect to the structure quality and efficiency of the process.

AB - UV and VUV laser ablation of micro-fluidic circuits for micro-total analysis systems (μTAS) is an alternative to more expensive techniques of LIGA or micro-moulding. The machining of trenches in PS, PC, PMMA (CQ grade and non-CQ grade) was investigated using two Q-switched solid state lasers. one operating at 266nm (fourth harmonic) and another at 355nm (third harmonic). These results were compared with results achieved using a 193nm Excimer laser. The structuring of the channels depends on both the laser wavelength and the target material. A comparison of the process will be presented with respect to the structure quality and efficiency of the process.

KW - Laser ablation

KW - Micro-fluidics

KW - Polymer materials

UR - https://www.scopus.com/pages/publications/27644552128

U2 - 10.1117/12.605144

DO - 10.1117/12.605144

M3 - Conference article

AN - SCOPUS:27644552128

SN - 0277-786X

VL - 5825

SP - 622

EP - 633

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 101

T2 - Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks

Y2 - 4 April 2005 through 6 April 2005

ER -

A comparative study of channel formation in polymer materials using VUV and UV nano-second laser sources for use in micro-fluidic applications

Abstract

Keywords

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